Publication:
High quality NH2SAM (Self Assembled Monolayer) diffusion barrier for advanced copper interconnects
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1909 since deposited on 2021-10-18
2last month
Acq. date: 2026-10-12
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Statistics
Views
1909 since deposited on 2021-10-18
2last month
Acq. date: 2026-10-12
Citations