Publication:
High quality NH2SAM (Self Assembled Monolayer) diffusion barrier for advanced copper interconnects
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1907 since deposited on 2021-10-18
1last month
Acq. date: 2026-09-20
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Statistics
Views
1907 since deposited on 2021-10-18
1last month
Acq. date: 2026-09-20
Citations