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Silicon fabrication technologies for micro filters

dc.contributor.authorMajeed, Bivragh
dc.contributor.authorDe Malsche, Wim
dc.contributor.authorFiorini, Paolo
dc.contributor.authorSabuncuoglu Tezcan, Deniz
dc.contributor.authorSoussan, Philippe
dc.date.accessioned2021-10-18T18:39:31Z
dc.date.available2021-10-18T18:39:31Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17554
dc.sourceIIOimport
dc.titleSilicon fabrication technologies for micro filters
dc.typeProceedings paper
dc.contributor.imecauthorMajeed, Bivragh
dc.contributor.imecauthorSabuncuoglu Tezcan, Deniz
dc.contributor.imecauthorSoussan, Philippe
dc.contributor.orcidimecSabuncuoglu Tezcan, Deniz::0000-0002-9237-7862
dc.contributor.orcidimecSoussan, Philippe::0000-0002-1347-6978
dc.source.peerreviewyes
dc.source.conference43rd International Symposium on Microelectronics
dc.source.conferencedate31/10/2010
dc.source.conferencelocationRaleigh, NC USA
imec.availabilityPublished - imec


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