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10 μm pixel-to-pixel pitch hybrid backside illuminated AlGaN-on-Si imagers for solar blind EUV radiation detection
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Authors
Malinowski, Pawel
;
Duboz, Jean-Yves
;
De Moor, Piet
;
John, Joachim
;
Minoglou, Kiki
;
Srivastava, Puneet
;
Creten, Ybe
;
Torfs, Tom
;
Putzeys, Jan
;
Semond, Fabrice
;
Frayssinet, Eric
;
Giordanengo, Boris
;
BenMoussa, Ali
;
Hochedez, Jean Francois
;
Mertens, Robert
;
Van Hoof, Chris
Conference
IEEE International Electron Devices Meeting - IEDM
Title
10 μm pixel-to-pixel pitch hybrid backside illuminated AlGaN-on-Si imagers for solar blind EUV radiation detection
Publication type
Proceedings paper
Embargo date
9999-12-31
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