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Enhancement of GaN-based device robustness by means of in-situ SiN cap layer
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Authors
Medjdoub, Farid
;
Marcon, Denis
;
Cheng, Kai
;
Van Hove, Marleen
;
Leys, Maarten
;
Decoutere, Stefaan
Conference
5th Space Agency - MOD Round Table Workshop on GaN Component Technologies
Title
Enhancement of GaN-based device robustness by means of in-situ SiN cap layer
Publication type
Meeting abstract
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