dc.contributor.author | Merckling, Clement | |
dc.date.accessioned | 2021-10-18T19:05:12Z | |
dc.date.available | 2021-10-18T19:05:12Z | |
dc.date.issued | 2010 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/17622 | |
dc.source | IIOimport | |
dc.title | Molecular beam passivation of Ge and III-V semiconductors for advanced CMOS | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Merckling, Clement | |
dc.contributor.orcidimec | Merckling, Clement::0000-0003-3084-2543 | |
dc.source.peerreview | no | |
dc.source.conference | 4th International Workshop on "High k Dielectrics on High Mobility Channel Materials" | |
dc.source.conferencedate | 25/05/2010 | |
dc.source.conferencelocation | Hsinchu Taiwan | |
imec.availability | Published - imec | |