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Molecular beam passivation of Ge and III-V semiconductors for advanced CMOS

dc.contributor.authorMerckling, Clement
dc.date.accessioned2021-10-18T19:05:12Z
dc.date.available2021-10-18T19:05:12Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17622
dc.sourceIIOimport
dc.titleMolecular beam passivation of Ge and III-V semiconductors for advanced CMOS
dc.typeOral presentation
dc.contributor.imecauthorMerckling, Clement
dc.contributor.orcidimecMerckling, Clement::0000-0003-3084-2543
dc.source.peerreviewno
dc.source.conference4th International Workshop on "High k Dielectrics on High Mobility Channel Materials"
dc.source.conferencedate25/05/2010
dc.source.conferencelocationHsinchu Taiwan
imec.availabilityPublished - imec


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