dc.contributor.author | Milenin, Alexey | |
dc.contributor.author | de Marneffe, Jean-Francois | |
dc.contributor.author | Struyf, Herbert | |
dc.contributor.author | Boullart, Werner | |
dc.contributor.author | Arleo, Paul | |
dc.date.accessioned | 2021-10-18T19:08:11Z | |
dc.date.available | 2021-10-18T19:08:11Z | |
dc.date.issued | 2010 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/17630 | |
dc.source | IIOimport | |
dc.title | Study on metrology of ERU tuning in TCP reactor using PVx2 sensor wafer | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Milenin, Alexey | |
dc.contributor.imecauthor | de Marneffe, Jean-Francois | |
dc.contributor.imecauthor | Struyf, Herbert | |
dc.contributor.imecauthor | Boullart, Werner | |
dc.contributor.orcidimec | Milenin, Alexey::0000-0003-0747-0462 | |
dc.contributor.orcidimec | Boullart, Werner::0000-0001-7614-2097 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 34 | |
dc.source.endpage | 38 | |
dc.source.conference | IEEE/SEMI Advanced Semiconductor Manufacturing Conference - ASMC | |
dc.source.conferencedate | 11/07/2010 | |
dc.source.conferencelocation | San Francisco, CA USA | |
dc.identifier.url | http://semi.omnibooksonline.com/asmc/data/papers/1_7.pdf | |
imec.availability | Published - open access | |