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Advanced nanoporous functional layer materials with extremely low dielectric constant

dc.contributor.authorMiller, Miroslaw
dc.contributor.authorUrbanowicz, Adam
dc.contributor.authorBroczkowska, Katarzyna
dc.date.accessioned2021-10-18T19:08:55Z
dc.date.available2021-10-18T19:08:55Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17632
dc.sourceIIOimport
dc.titleAdvanced nanoporous functional layer materials with extremely low dielectric constant
dc.typeProceedings paper
dc.source.peerreviewno
dc.source.conference11th International Workshop on Stress-Induced Phenomena in Metallization
dc.source.conferencedate12/04/2010
dc.source.conferencelocationDresden Germany
imec.availabilityPublished - imec
imec.internalnoteshttp://www.malab.com/stress_workshop_2010/registration.html


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