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Test structures for characterization of thermal-mechanical stress in 3D stacked IC for analog design
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Authors
Minas, Nikolaos
;
Van der Plas, Geert
;
Oprins, Herman
;
Yang, Yu
;
Okoro, Chukwudi
;
Mercha, Abdelkarim
;
Torregiani, Cristina
;
Perry, Dan
;
Marchal, Pol
;
Rakowski, Michal
;
Cherman, Vladimir
Conference
23rd IEEE International Conference on Microelectronic Test Structures - ICMTS
Title
Test structures for characterization of thermal-mechanical stress in 3D stacked IC for analog design
Publication type
Proceedings paper
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