Show simple item record

High hole-mobility 65nm biaxially-strained Ge-pFETs: fabrication, analysis and optimization

dc.contributor.authorMitard, Jerome
dc.contributor.authorDe Jaeger, Brice
dc.contributor.authorEneman, Geert
dc.contributor.authorDobbie, Andrew
dc.contributor.authorMyronov, M.
dc.contributor.authorKobayashi, Masaharu
dc.contributor.authorGeypen, Jef
dc.contributor.authorBender, Hugo
dc.contributor.authorVincent, Benjamin
dc.contributor.authorKrom, Raymond
dc.contributor.authorFranco, Jacopo
dc.contributor.authorWinderickx, Gillis
dc.contributor.authorVrancken, Evi
dc.contributor.authorVanherle, Wendy
dc.contributor.authorWang, Wei-E
dc.contributor.authorTseng, Joshua
dc.contributor.authorLoo, Roger
dc.contributor.authorDe Meyer, Kristin
dc.contributor.authorCaymax, Matty
dc.contributor.authorPantisano, Luigi
dc.contributor.authorLeadley, David
dc.contributor.authorMeuris, Marc
dc.contributor.authorAbsil, Philippe
dc.contributor.authorBiesemans, Serge
dc.contributor.authorHoffmann, Thomas Y.
dc.date.accessioned2021-10-18T19:12:14Z
dc.date.available2021-10-18T19:12:14Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17640
dc.sourceIIOimport
dc.titleHigh hole-mobility 65nm biaxially-strained Ge-pFETs: fabrication, analysis and optimization
dc.typeProceedings paper
dc.contributor.imecauthorMitard, Jerome
dc.contributor.imecauthorDe Jaeger, Brice
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorGeypen, Jef
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorVincent, Benjamin
dc.contributor.imecauthorFranco, Jacopo
dc.contributor.imecauthorWinderickx, Gillis
dc.contributor.imecauthorVrancken, Evi
dc.contributor.imecauthorVanherle, Wendy
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorDe Meyer, Kristin
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorAbsil, Philippe
dc.contributor.imecauthorBiesemans, Serge
dc.contributor.orcidimecMitard, Jerome::0000-0002-7422-079X
dc.contributor.orcidimecDe Jaeger, Brice::0000-0001-8804-7556
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecFranco, Jacopo::0000-0002-7382-8605
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.source.peerreviewno
dc.source.beginpage1038
dc.source.endpage1039
dc.source.conferenceInternational Conference on Solid-State Devices and Materials - SSDM
dc.source.conferencedate22/09/2010
dc.source.conferencelocationTokyo Japan
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record