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Electrical characterization of Si capped Hf)2/metal gate Ge-pFETs: physical insight into critical parameters
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Authors
Mitard, Jerome
;
Vincent, Benjamin
;
De Jaeger, Brice
;
Martens, Koen
;
Krom, Raymond
;
Loo, Roger
;
Eneman, Geert
;
De Meyer, Kristin
;
Meuris, Marc
;
Heyns, Marc
;
Vandervorst, Wilfried
;
Caymax, Matty
;
Hoffmann, Thomas Y.
Conference
217th Electrochemical Society Meeting
Title
Electrical characterization of Si capped Hf)2/metal gate Ge-pFETs: physical insight into critical parameters
Publication type
Meeting abstract
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