High-mobility 0.85nm-EOT Si0.45Ge0.55 pFETs: delivering high performance at scaled VDD

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Author(s)

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Witters, Liesbeth

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Garcia Bardon, Marie

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Christie, Phillip

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Mercha, Abdelkarim

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Ragnarsson, Lars-Ake

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Hikavyy, Andriy

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Vincent, Benjamin

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Chiarella, Thomas

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Yamaguchi, Shinpei

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Takeoka, Shinji

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Absil, Philippe

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Hoffmann, Thomas Y.

Metrics

1 since deposited on 2021-10-18

Acq. date: 2025-10-24

1939 since deposited on 2021-10-18

Acq. date: 2025-10-24