Show simple item record

Mechanical characterisation of poly-SiGe layers for CMOS-MEMS integrated applications

dc.contributor.authorModlinski, Robert
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorVerbist, Agnes
dc.contributor.authorPuers, Bob
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-18T19:14:51Z
dc.date.available2021-10-18T19:14:51Z
dc.date.issued2010
dc.identifier.issn0960-1317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17646
dc.sourceIIOimport
dc.titleMechanical characterisation of poly-SiGe layers for CMOS-MEMS integrated applications
dc.typeJournal article
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewyes
dc.source.beginpage15014
dc.source.journalJournal of Micromechanics and Microengineering
dc.source.issue1
dc.source.volume20
dc.identifier.urlhttp://www.iop.org/EJ/article/-alert=44438/0960-1317/20/1/015014/jmm10 1 01514.pdf
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record