Mechanical characterisation of poly-SiGe layers for CMOS-MEMS integrated applications

Metadata

Show full item record

Authors

Modlinski, Robert; Witvrouw, Ann; Verbist, Agnes; Puers, Bob; De Wolf, Ingrid

ISSN

0960-1317

Issue

1

Journal

Journal of Micromechanics and Microengineering

Volume

20

Title

Mechanical characterisation of poly-SiGe layers for CMOS-MEMS integrated applications

Publication type

Journal article

Collections

Articles