Publication:
Mechanical characterisation of poly-SiGe layers for CMOS-MEMS integrated applications
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1911 since deposited on 2021-10-18
1last month
Acq. date: 2026-02-28
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Statistics
Views
1911 since deposited on 2021-10-18
1last month
Acq. date: 2026-02-28
Citations