Publication:
Mechanical characterisation of poly-SiGe layers for CMOS-MEMS integrated applications
Date
| dc.contributor.author | Modlinski, Robert | |
| dc.contributor.author | Witvrouw, Ann | |
| dc.contributor.author | Verbist, Agnes | |
| dc.contributor.author | Puers, Bob | |
| dc.contributor.author | De Wolf, Ingrid | |
| dc.contributor.imecauthor | Puers, Bob | |
| dc.contributor.imecauthor | De Wolf, Ingrid | |
| dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
| dc.date.accessioned | 2021-10-18T19:14:51Z | |
| dc.date.available | 2021-10-18T19:14:51Z | |
| dc.date.issued | 2010 | |
| dc.identifier.issn | 0960-1317 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/17646 | |
| dc.identifier.url | http://www.iop.org/EJ/article/-alert=44438/0960-1317/20/1/015014/jmm10 1 01514.pdf | |
| dc.source.beginpage | 15014 | |
| dc.source.issue | 1 | |
| dc.source.journal | Journal of Micromechanics and Microengineering | |
| dc.source.volume | 20 | |
| dc.title | Mechanical characterisation of poly-SiGe layers for CMOS-MEMS integrated applications | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |