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Dopant and carrier profiling in FinFET-based devices with sub-nanometer resolution

dc.contributor.authorMody, Jay
dc.contributor.authorKambham, Ajay Kumar
dc.contributor.authorZschaetzsch, Gerd
dc.contributor.authorSchatzer, Philipp
dc.contributor.authorChiarella, Thomas
dc.contributor.authorCollaert, Nadine
dc.contributor.authorWitters, Liesbeth
dc.contributor.authorJurczak, Gosia
dc.contributor.authorHoriguchi, Naoto
dc.contributor.authorGilbert, Matthieu
dc.contributor.authorEyben, Pierre
dc.contributor.authorKoelling, Sebastian
dc.contributor.authorSchulze, Andreas
dc.contributor.authorHoffmann, Thomas Y.
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-18T19:15:50Z
dc.date.available2021-10-18T19:15:50Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17648
dc.sourceIIOimport
dc.titleDopant and carrier profiling in FinFET-based devices with sub-nanometer resolution
dc.typeProceedings paper
dc.contributor.imecauthorChiarella, Thomas
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.imecauthorWitters, Liesbeth
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecChiarella, Thomas::0000-0002-6155-9030
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage195
dc.source.endpage196
dc.source.conferenceIEEE Symposium on VLSI Technology
dc.source.conferencedate15/06/2010
dc.source.conferencelocationHonolulu, HI US
imec.availabilityPublished - open access


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