Properties of diamond films grown by MWPECVD with DC substrate bias

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Authors
Mortet, Vincent; Zhang, L.; Eckert, M.; D'Haen, Jan; Sotani, A.; Moreau, M.; Saitner, M.; Troadec, D.; Neyts, E.; de Jaeger, J.C.; Verbeeck, J.; Bogaerts, A.; Boyen, H.G.; Van Tendeloo, G.; Haenen, Ken; Wagner, Patrick
Conference
Engineering of Functional Interfaces - EnFI
Title
Properties of diamond films grown by MWPECVD with DC substrate bias
Publication type
Meeting abstract
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