Strain evaluation of electron irradiated SiGe/Si diodes by Raman spectroscopy

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Authors
Naka, N.; Ohyama, H.; Tsunoda, I.; Takakura, K.; Bargallo Gonzalez, Mireia; Simoen, Eddy; Claeys, Cor
Conference
2nd Semiconductor Materials and Devices Forum - SMDF-2
Title
Strain evaluation of electron irradiated SiGe/Si diodes by Raman spectroscopy
Publication type
Proceedings paper
Embargo date
9999-12-31
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