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Radiation damages of SiGe devices by electron irradiation and their thermally recovery bahavior

dc.contributor.authorNakashima, T.
dc.contributor.authorIdemoto, T.
dc.contributor.authorTakakura, K.
dc.contributor.authorTsunoda, I.
dc.contributor.authorYoneoka, M.
dc.contributor.authorOhyama, H.
dc.contributor.authorYoshino, K.
dc.contributor.authorBargallo Gonzalez, Mireia
dc.contributor.authorSimoen, Eddy
dc.contributor.authorEneman, Geert
dc.contributor.authorClaeys, Cor
dc.date.accessioned2021-10-18T19:29:36Z
dc.date.available2021-10-18T19:29:36Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17683
dc.sourceIIOimport
dc.titleRadiation damages of SiGe devices by electron irradiation and their thermally recovery bahavior
dc.typeProceedings paper
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorEneman, Geert
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.source.peerreviewno
dc.source.beginpage56
dc.source.endpage59
dc.source.conference2nd Semiconductor Materials and Devices Forum - SMDF-2
dc.source.conferencedate11/12/2010
dc.source.conferencelocationKumamoto Japan
imec.availabilityPublished - imec


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