Authors

Nguyen, Duy; Rosseel, Erik; Takeuchi, Shotaro; Everaert, Jean-Luc; Yang, Lijun; Goossens, Jozefien; Moussa, Alain; Clarysse, Trudo; Richard, Olivier; Bender, Hugo; Zaima, S.; Sakai, A.; Loo, Roger; Lin, J.C.; Vandervorst, Wilfried; Caymax, Matty

ISSN

0040-6090

Issue

6, Suppl. 1

Journal

Thin Solid Films

Volume

518

Title

Use of p- and n-type vapor phase doping and sub-melt laser anneal for extension junctions in sub-32 nm CMOS technology

Publication type

Journal article