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Selective epitaxial growth of III-V semiconductor heterostructures on Si substrates for logic applications
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Authors
Nguyen, Duy
;
Wang, Gang
;
Waldron, Niamh
;
Winderickx, Gillis
;
Brammertz, Guy
;
Leys, Maarten
;
Lismont, Kevin
;
Dekoster, Johan
;
Loo, Roger
;
Meuris, Marc
;
Degroote, Stefan
;
Caymax, Matty
;
Feron, O.
;
Buttitta, F.
;
O'Neil, B.
;
Lindner, J.
;
Schulte, F.
;
Schineller, B.
;
Heuken, M.
Conference
218th Electrochemical Society Meeting: SiGe, Ge & Related Compounds: Materials, Processing, and Devices Symposium
Title
Selective epitaxial growth of III-V semiconductor heterostructures on Si substrates for logic applications
Publication type
Meeting abstract
Embargo date
9999-12-31
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