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Formation of Ni(Ge1-ySny)/Ge1-xSnx/Ge contact for Ge1-xSnx source/drain Stressor

dc.contributor.authorNishimura, T.
dc.contributor.authorNakatsuka, O.
dc.contributor.authorShimura, Y.
dc.contributor.authorTakeuchi, S.
dc.contributor.authorVincent, Benjamin
dc.contributor.authorVantomme, Andre
dc.contributor.authorDekoster, Johan
dc.contributor.authorCaymax, Matty
dc.contributor.authorLoo, Roger
dc.contributor.authorZaima, S.
dc.date.accessioned2021-10-18T19:36:22Z
dc.date.available2021-10-18T19:36:22Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17699
dc.sourceIIOimport
dc.titleFormation of Ni(Ge1-ySny)/Ge1-xSnx/Ge contact for Ge1-xSnx source/drain Stressor
dc.typeOral presentation
dc.contributor.imecauthorVincent, Benjamin
dc.contributor.imecauthorVantomme, Andre
dc.contributor.imecauthorDekoster, Johan
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorLoo, Roger
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.source.peerreviewno
dc.source.conference10th Chubu - Local Meeting of The Surface Science Society of Japan
dc.source.conferencedate18/12/2010
dc.source.conferencelocationNagoya Japan
imec.availabilityPublished - imec


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