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Elimination of the axial deformation problem of Cu-TSV in 3D integration

dc.contributor.authorOkoro, Chukwudi
dc.contributor.authorHuyghebaert, Cedric
dc.contributor.authorVan Olmen, Jan
dc.contributor.authorLabie, Riet
dc.contributor.authorVandevelde, Bart
dc.contributor.authorBeyne, Eric
dc.contributor.authorVandepitte, Dirk
dc.date.accessioned2021-10-18T19:48:23Z
dc.date.available2021-10-18T19:48:23Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17729
dc.sourceIIOimport
dc.titleElimination of the axial deformation problem of Cu-TSV in 3D integration
dc.typeProceedings paper
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.imecauthorVan Olmen, Jan
dc.contributor.imecauthorLabie, Riet
dc.contributor.imecauthorVandevelde, Bart
dc.contributor.imecauthorBeyne, Eric
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.contributor.orcidimecLabie, Riet::0000-0002-1401-1291
dc.contributor.orcidimecVandevelde, Bart::0000-0002-6753-6438
dc.contributor.orcidimecBeyne, Eric::0000-0002-3096-050X
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage214
dc.source.endpage220
dc.source.conferenceStress-Induced Phenomena in Metallization: 11th International Workshop
dc.source.conferencedate12/04/2010
dc.source.conferencelocationDresden Germany
imec.availabilityPublished - open access
imec.internalnotesAIP Conference Proceedings; Vol. 1300


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