dc.contributor.author | Ong, Patrick | |
dc.contributor.author | Witters, Liesbeth | |
dc.contributor.author | Leunissen, Peter | |
dc.date.accessioned | 2021-10-18T19:49:32Z | |
dc.date.available | 2021-10-18T19:49:32Z | |
dc.date.issued | 2010 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/17732 | |
dc.source | IIOimport | |
dc.title | CMP of Ge for high mobility channels | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Ong, Patrick | |
dc.contributor.imecauthor | Witters, Liesbeth | |
dc.contributor.orcidimec | Ong, Patrick::0000-0002-2072-292X | |
dc.source.peerreview | yes | |
dc.source.conference | International Conference on Planarization/CMP Technology - ICPT | |
dc.source.conferencedate | 14/11/2010 | |
dc.source.conferencelocation | Phoenix, AZ USA | |
imec.availability | Published - imec | |