Show simple item record

Handling gases in semiconductor industry

dc.contributor.authorPardon, Alain
dc.date.accessioned2021-10-18T20:01:27Z
dc.date.available2021-10-18T20:01:27Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17762
dc.sourceIIOimport
dc.titleHandling gases in semiconductor industry
dc.typeOral presentation
dc.contributor.imecauthorPardon, Alain
dc.source.peerreviewno
dc.source.conferenceEIGA Workshop "Safe Management of Special Gases"
dc.source.conferencedate28/01/2010
dc.source.conferencelocationBrussel Belgium
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record