Handling gases in semiconductor industry
dc.contributor.author | Pardon, Alain | |
dc.date.accessioned | 2021-10-18T20:01:27Z | |
dc.date.available | 2021-10-18T20:01:27Z | |
dc.date.issued | 2010 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/17762 | |
dc.source | IIOimport | |
dc.title | Handling gases in semiconductor industry | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Pardon, Alain | |
dc.source.peerreview | no | |
dc.source.conference | EIGA Workshop "Safe Management of Special Gases" | |
dc.source.conferencedate | 28/01/2010 | |
dc.source.conferencelocation | Brussel Belgium | |
imec.availability | Published - imec |
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