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Electrical characterization of InGaAs ultra-shallow junctions

dc.contributor.authorPetersen, Dirch H.
dc.contributor.authorHansen, Ole
dc.contributor.authorBĝggild, Peter
dc.contributor.authorLin, Rong
dc.contributor.authorNielsen, Peter F.
dc.contributor.authorLin, Dennis
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorAlian, AliReza
dc.contributor.authorMerckling, Clement
dc.contributor.authorPenaud, Julien
dc.contributor.authorBrammertz, Guy
dc.contributor.authorGoossens, Jozefien
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorClarysse, Trudo
dc.date.accessioned2021-10-18T20:14:53Z
dc.date.available2021-10-18T20:14:53Z
dc.date.issued2010
dc.identifier.issn1071-1023
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17796
dc.sourceIIOimport
dc.titleElectrical characterization of InGaAs ultra-shallow junctions
dc.typeJournal article
dc.contributor.imecauthorLin, Dennis
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorAlian, AliReza
dc.contributor.imecauthorMerckling, Clement
dc.contributor.imecauthorBrammertz, Guy
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecMerckling, Clement::0000-0003-3084-2543
dc.contributor.orcidimecBrammertz, Guy::0000-0003-1404-7339
dc.source.peerreviewyes
dc.source.beginpageC1C41
dc.source.endpageC1C47
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.issue1
dc.source.volume28
dc.identifier.urlhttp://dx.doi.org/10.1116/1.3231492
imec.availabilityPublished - imec


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