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A capacitive humidity sensor using a positive photosensitive polymer

dc.contributor.authorPham, Nga
dc.contributor.authorCherman, Vladimir
dc.contributor.authorDuval, Fabrice
dc.contributor.authorSabuncuoglu Tezcan, Deniz
dc.contributor.authorJansen, Roelof
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-18T20:17:50Z
dc.date.available2021-10-18T20:17:50Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17803
dc.sourceIIOimport
dc.titleA capacitive humidity sensor using a positive photosensitive polymer
dc.typeProceedings paper
dc.contributor.imecauthorPham, Nga
dc.contributor.imecauthorCherman, Vladimir
dc.contributor.imecauthorDuval, Fabrice
dc.contributor.imecauthorSabuncuoglu Tezcan, Deniz
dc.contributor.imecauthorJansen, Roelof
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecSabuncuoglu Tezcan, Deniz::0000-0002-9237-7862
dc.contributor.orcidimecJansen, Roelof::0000-0001-6685-4699
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewno
dc.source.beginpage60
dc.source.endpage63
dc.source.conference21st Micromechanics and Microsystems Europe Workshop - MME
dc.source.conferencedate26/09/2010
dc.source.conferencelocationEnschede The Netherlands
imec.availabilityPublished - imec


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