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Impact of thermal treatment upon morphology and crystallinity of strontium titanate films deposited by atomic layer deposition

dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorMenou, Nicolas
dc.contributor.authorFavia, Paola
dc.contributor.authorBender, Hugo
dc.contributor.authorRosseel, Erik
dc.contributor.authorSwerts, Johan
dc.contributor.authorVrancken, Christa
dc.contributor.authorMoussa, Alain
dc.contributor.authorTielens, Hilde
dc.contributor.authorTomida, Kazuyuki
dc.contributor.authorPawlak, Malgorzata
dc.contributor.authorKaczer, Ben
dc.contributor.authorSchoofs, Geert
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorWouters, Dirk
dc.contributor.authorKittl, Jorge
dc.date.accessioned2021-10-18T20:28:08Z
dc.date.available2021-10-18T20:28:08Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17829
dc.sourceIIOimport
dc.titleImpact of thermal treatment upon morphology and crystallinity of strontium titanate films deposited by atomic layer deposition
dc.typeMeeting abstract
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorFavia, Paola
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorRosseel, Erik
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorVrancken, Christa
dc.contributor.imecauthorMoussa, Alain
dc.contributor.imecauthorTielens, Hilde
dc.contributor.imecauthorTomida, Kazuyuki
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorSchoofs, Geert
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecFavia, Paola::0000-0002-1019-3497
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.source.peerreviewno
dc.source.conference16th Workshop on Dielectrics in Microelectronics - WODIM
dc.source.conferencedate28/06/2010
dc.source.conferencelocationBratislava Slovakia
imec.availabilityPublished - imec


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