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Atomic layer deposition of strontium titanate films using Sr(tBu3Cp)2 and Ti(OMe)4

dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorMenou, Nicolas
dc.contributor.authorSwerts, Johan
dc.contributor.authorPierreux, Dieter
dc.contributor.authorDelabie, Annelies
dc.contributor.authorBrijs, Bert
dc.contributor.authorConard, Thierry
dc.contributor.authorOpsomer, Karl
dc.contributor.authorMaes, Jan
dc.contributor.authorWouters, Dirk
dc.contributor.authorKittl, Jorge
dc.date.accessioned2021-10-18T20:28:38Z
dc.date.available2021-10-18T20:28:38Z
dc.date.issued2010
dc.identifier.issn0013-4651
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17830
dc.sourceIIOimport
dc.titleAtomic layer deposition of strontium titanate films using Sr(tBu3Cp)2 and Ti(OMe)4
dc.typeJournal article
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorPierreux, Dieter
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorOpsomer, Karl
dc.contributor.imecauthorMaes, Jan
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpageG1
dc.source.endpageG6
dc.source.journalJournal of the Electrochemical Society
dc.source.issue1
dc.source.volume157
dc.identifier.urlhttp://scitation.aip.org/getpdf/servlet/GetPDFServlet?filetype=pdf&id=JESOAN0001570000010000G1000001&idtype=cvips&prog=normal
imec.availabilityPublished - open access


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