Atomic layer deposition of strontium titanate films using Sr(tBu3Cp)2 and Ti(OMe)4

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Authors

Popovici, Mihaela Ioana; Van Elshocht, Sven; Menou, Nicolas; Swerts, Johan; Pierreux, Dieter; Delabie, Annelies; Brijs, Bert; Conard, Thierry; Opsomer, Karl; Maes, Jan; Wouters, Dirk; Kittl, Jorge

ISSN

0013-4651

Issue

1

Journal

Journal of the Electrochemical Society

Volume

157

Title

Atomic layer deposition of strontium titanate films using Sr(tBu3Cp)2 and Ti(OMe)4

Publication type

Journal article

Embargo date

9999-12-31

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