Publication:

Atomic layer deposition of strontium titanate films using Sr(tBu3Cp)2 and Ti(OMe)4

Date

2010
Journal article
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dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorMenou, Nicolas
dc.contributor.authorSwerts, Johan
dc.contributor.authorPierreux, Dieter
dc.contributor.authorDelabie, Annelies
dc.contributor.authorBrijs, Bert
dc.contributor.authorConard, Thierry
dc.contributor.authorOpsomer, Karl
dc.contributor.authorMaes, Jan
dc.contributor.authorWouters, Dirk
dc.contributor.authorKittl, Jorge
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorPierreux, Dieter
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorOpsomer, Karl
dc.contributor.imecauthorMaes, Jan
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.date.accessioned2021-10-18T20:28:38Z
dc.date.available2021-10-18T20:28:38Z
dc.date.embargo9999-12-31
dc.date.issued2010
dc.identifier.issn0013-4651
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17830
dc.identifier.urlhttp://scitation.aip.org/getpdf/servlet/GetPDFServlet?filetype=pdf&id=JESOAN0001570000010000G1000001&idtype=cvips&prog=normal
dc.source.beginpageG1
dc.source.endpageG6
dc.source.issue1
dc.source.journalJournal of the Electrochemical Society
dc.source.volume157
dc.title

Atomic layer deposition of strontium titanate films using Sr(tBu3Cp)2 and Ti(OMe)4

dc.typeJournal article
dspace.entity.typePublication
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