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ALD strontium titanates and their characterization

dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorTomida, Kazuyuki
dc.contributor.authorMenou, Nicolas
dc.contributor.authorSwerts, Johan
dc.contributor.authorPawlak, Malgorzata
dc.contributor.authorKaczer, Ben
dc.contributor.authorKim, Min-Soo
dc.contributor.authorBrijs, Bert
dc.contributor.authorFavia, Paola
dc.contributor.authorConard, Thierry
dc.contributor.authorFranquet, Alexis
dc.contributor.authorMoussa, Alain
dc.contributor.authorDebusschere, Ingrid
dc.contributor.authorAltimime, Laith
dc.contributor.authorKittl, Jorge
dc.date.accessioned2021-10-18T20:29:10Z
dc.date.available2021-10-18T20:29:10Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17831
dc.sourceIIOimport
dc.titleALD strontium titanates and their characterization
dc.typeOral presentation
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorTomida, Kazuyuki
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorKim, Min-Soo
dc.contributor.imecauthorFavia, Paola
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorMoussa, Alain
dc.contributor.imecauthorDebusschere, Ingrid
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecKim, Min-Soo::0000-0003-0211-0847
dc.contributor.orcidimecFavia, Paola::0000-0002-1019-3497
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.source.peerreviewno
dc.source.conferenceInternational Workshop on Power Supply On Chip
dc.source.conferencedate13/09/2010
dc.source.conferencelocationCork Ireland
dc.identifier.urlhttp://www.powersoc.org/schedule.php
imec.availabilityPublished - imec


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