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Novel MEMS demonstrators show versatility of imec's SiGe MEMS technology platform

dc.contributor.authorProvoost, Jan
dc.contributor.authorVan Bavel, Mieke
dc.contributor.authorWitvrouw, Ann
dc.date.accessioned2021-10-18T20:35:17Z
dc.date.available2021-10-18T20:35:17Z
dc.date.issued2010-07
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17847
dc.sourceIIOimport
dc.titleNovel MEMS demonstrators show versatility of imec's SiGe MEMS technology platform
dc.typeJournal article
dc.contributor.imecauthorProvoost, Jan
dc.contributor.imecauthorVan Bavel, Mieke
dc.source.peerreviewno
dc.source.journalSemicon West Show Daily
dc.identifier.urlhttp://www.mysemicondaily.com/blog/2010/7/13/imec-demos-versatile-sige-mems-tech-platform.html
imec.availabilityPublished - imec


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