Publication:
Novel MEMS demonstrators show versatility of imec's SiGe MEMS technology platform
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1824 since deposited on 2021-10-18
1last month
Acq. date: 2026-08-07
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Statistics
Views
1824 since deposited on 2021-10-18
1last month
Acq. date: 2026-08-07
Citations