Publication:
Novel MEMS demonstrators show versatility of imec's SiGe MEMS technology platform
Date
| dc.contributor.author | Provoost, Jan | |
| dc.contributor.author | Van Bavel, Mieke | |
| dc.contributor.author | Witvrouw, Ann | |
| dc.contributor.imecauthor | Provoost, Jan | |
| dc.contributor.imecauthor | Van Bavel, Mieke | |
| dc.date.accessioned | 2021-10-18T20:35:17Z | |
| dc.date.available | 2021-10-18T20:35:17Z | |
| dc.date.issued | 2010-07 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/17847 | |
| dc.identifier.url | http://www.mysemicondaily.com/blog/2010/7/13/imec-demos-versatile-sige-mems-tech-platform.html | |
| dc.source.journal | Semicon West Show Daily | |
| dc.title | Novel MEMS demonstrators show versatility of imec's SiGe MEMS technology platform | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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