Authors

Radisic, Alex; Nagar, Magi; Strubbe, K.; Armini, Silvia; El-Mekki, Zaid; Volders, Henny; Ruythooren, Wouter; Vereecken, Philippe

Conference

Semiconductors, Metal Oxides, and Composites: Metallization and Electrodeposition of Thin Films and Nanostructures

Title

Copper plating on resistive substrates, diffusion barrier and alternative seed layers

Publication type

Proceedings paper

Embargo date

9999-12-31