dc.contributor.author | Radisic, Alex | |
dc.contributor.author | Philipsen, Harold | |
dc.contributor.author | Honore, Mia | |
dc.contributor.author | Wang, Yu-Shuen | |
dc.contributor.author | Heylen, Nancy | |
dc.contributor.author | El-Mekki, Zaid | |
dc.contributor.author | Armini, Silvia | |
dc.contributor.author | Vandersmissen, Kevin | |
dc.contributor.author | Rodet, Simon | |
dc.contributor.author | Van Ammel, Annemie | |
dc.contributor.author | Bender, Hugo | |
dc.contributor.author | Drijbooms, Chris | |
dc.contributor.author | Vanstreels, Kris | |
dc.contributor.author | Ruythooren, Wouter | |
dc.date.accessioned | 2021-10-18T20:42:56Z | |
dc.date.available | 2021-10-18T20:42:56Z | |
dc.date.issued | 2010 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/17866 | |
dc.source | IIOimport | |
dc.title | TSV Cu plating and implications for CMP | |
dc.type | Meeting abstract | |
dc.contributor.imecauthor | Radisic, Alex | |
dc.contributor.imecauthor | Philipsen, Harold | |
dc.contributor.imecauthor | Heylen, Nancy | |
dc.contributor.imecauthor | El-Mekki, Zaid | |
dc.contributor.imecauthor | Armini, Silvia | |
dc.contributor.imecauthor | Vandersmissen, Kevin | |
dc.contributor.imecauthor | Van Ammel, Annemie | |
dc.contributor.imecauthor | Bender, Hugo | |
dc.contributor.imecauthor | Drijbooms, Chris | |
dc.contributor.imecauthor | Vanstreels, Kris | |
dc.contributor.imecauthor | Ruythooren, Wouter | |
dc.contributor.orcidimec | Philipsen, Harold::0000-0002-5029-1104 | |
dc.contributor.orcidimec | Armini, Silvia::0000-0003-0578-3422 | |
dc.contributor.orcidimec | Vanstreels, Kris::0000-0002-4420-0966 | |
dc.source.peerreview | no | |
dc.source.beginpage | 1991 | |
dc.source.conference | 218th Electrochemical Society Meeting | |
dc.source.conferencedate | 10/10/2010 | |
dc.source.conferencelocation | Las Vegas, NV USA | |
dc.identifier.url | http://ecsmeet3.peerx-press.org/ms_files/ecsmeet3/2010/05/03/00000660/00/660_0_art_0_l1q2l3.pdf | |
imec.availability | Published - imec | |
imec.internalnotes | Meeting Abstracts; Vol. MA2010-02 | |