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3D integration technology: status and application development

dc.contributor.authorRamm, P.
dc.contributor.authorKlumpp, A.
dc.contributor.authorWeber, Josef
dc.contributor.authorLietaer, N.
dc.contributor.authorTaklo, Maaike
dc.contributor.authorDe Raedt, Walter
dc.contributor.authorFritzsch, T.
dc.contributor.authorCouderc, Pascal
dc.date.accessioned2021-10-18T20:43:50Z
dc.date.available2021-10-18T20:43:50Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17868
dc.sourceIIOimport
dc.title3D integration technology: status and application development
dc.typeProceedings paper
dc.contributor.imecauthorDe Raedt, Walter
dc.contributor.orcidimecDe Raedt, Walter::0000-0002-7117-7976
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage9
dc.source.endpage16
dc.source.conference40th European Solid-State Device Research Conference - ESSDERC
dc.source.conferencedate13/09/2010
dc.source.conferencelocationSevilla Spain
imec.availabilityPublished - open access


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