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High resolution medium energy ion scattering (MEIS) analysis for the quantitative depth profiling of ultra thin high-k layers

dc.contributor.authorReading, M. A.
dc.contributor.authorvan den Berg, J. A.
dc.contributor.authorZalm, P. C.
dc.contributor.authorArmour, D. G.
dc.contributor.authorBailey, P.
dc.contributor.authorNoakes, T. C. Q.
dc.contributor.authorParisini, A.
dc.contributor.authorConard, Thierry
dc.contributor.authorDe Gendt, Stefan
dc.date.accessioned2021-10-18T20:46:19Z
dc.date.available2021-10-18T20:46:19Z
dc.date.issued2010
dc.identifier.issn1071-1023
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17874
dc.sourceIIOimport
dc.titleHigh resolution medium energy ion scattering (MEIS) analysis for the quantitative depth profiling of ultra thin high-k layers
dc.typeJournal article
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpageC1C65
dc.source.endpageC1C70
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.issue1
dc.source.volume28
imec.availabilityPublished - open access


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