Authors

Czerwinski, A.; Tomaszewski, D.; Gibki, J.; Bakowski, A.; Klima, K.; Katcki, J.; Simoen, Eddy; Claeys, Cor

Conference

Crystalline Defects and Contamination Control: Their Impact and Control in Device Manufacturing II

Title

Optimised diode analysis of electrical silicon substrate properties

Publication type

Proceedings paper

Embargo date

9999-12-31