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Integrated optomechanical circuits

dc.contributor.authorRoels, Joris
dc.contributor.authorMaes, Bjorn
dc.contributor.authorBaets, Roel
dc.contributor.authorVan Thourhout, Dries
dc.date.accessioned2021-10-18T20:56:11Z
dc.date.available2021-10-18T20:56:11Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17897
dc.sourceIIOimport
dc.titleIntegrated optomechanical circuits
dc.typeProceedings paper
dc.contributor.imecauthorBaets, Roel
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conferenceIntegrated Photonics Research, Silicon and Nano Photonics (IPR), Photonics in Switching (PS)
dc.source.conferencedate25/07/2010
dc.source.conferencelocationMonterey, CA USA
imec.availabilityPublished - open access
imec.internalnotespaper IMF4


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