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Passive temperature-compensation of MEM resonators

dc.contributor.authorRottenberg, Xavier
dc.contributor.authorJansen, Roelof
dc.contributor.authorStoffels, Steve
dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorDe Raedt, Walter
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-18T21:02:23Z
dc.date.available2021-10-18T21:02:23Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17912
dc.sourceIIOimport
dc.titlePassive temperature-compensation of MEM resonators
dc.typeProceedings paper
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorJansen, Roelof
dc.contributor.imecauthorStoffels, Steve
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorDe Raedt, Walter
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecJansen, Roelof::0000-0001-6685-4699
dc.contributor.orcidimecDe Raedt, Walter::0000-0002-7117-7976
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewyes
dc.source.conferenceNSTI Nanotech Conference and Expo
dc.source.conferencedate21/06/2010
dc.source.conferencelocationAnaheim, CA USA
imec.availabilityPublished - imec


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