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A novel trapping/detrapping model for defect profiling in high-k materials using the two-pulse capacitance-voltage technique
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Authors
Ruiz Aguado, Daniel
;
Govoreanu, Bogdan
;
Zhang, W.D.
;
Jurczak, Gosia
;
De Meyer, Kristin
;
Van Houdt, Jan
ISSN
0018-9383
Issue
10
Journal
IEEE Transactions on Electron Devices
Volume
57
Title
A novel trapping/detrapping model for defect profiling in high-k materials using the two-pulse capacitance-voltage technique
Publication type
Journal article
Embargo date
9999-12-31
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