Fabrication and electrical evaluation of va last polymer liner TSVs

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Authors

Sabuncuoglu Tezcan, Deniz; Majeed, Bivragh; Civale, Yann; Soussan, Philippe; Beyne, Eric

ISSN

1551-4897

Issue

3

Journal

Journal of Microelectronics and Electronic Packaging

Volume

7

Title

Fabrication and electrical evaluation of va last polymer liner TSVs

Publication type

Journal article

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