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Fabrication and electrical evaluation of va last polymer liner TSVs

dc.contributor.authorSabuncuoglu Tezcan, Deniz
dc.contributor.authorMajeed, Bivragh
dc.contributor.authorCivale, Yann
dc.contributor.authorSoussan, Philippe
dc.contributor.authorBeyne, Eric
dc.date.accessioned2021-10-18T21:06:35Z
dc.date.available2021-10-18T21:06:35Z
dc.date.issued2010
dc.identifier.issn1551-4897
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17922
dc.sourceIIOimport
dc.titleFabrication and electrical evaluation of va last polymer liner TSVs
dc.typeJournal article
dc.contributor.imecauthorSabuncuoglu Tezcan, Deniz
dc.contributor.imecauthorMajeed, Bivragh
dc.contributor.imecauthorSoussan, Philippe
dc.contributor.imecauthorBeyne, Eric
dc.contributor.orcidimecSabuncuoglu Tezcan, Deniz::0000-0002-9237-7862
dc.contributor.orcidimecSoussan, Philippe::0000-0002-1347-6978
dc.contributor.orcidimecBeyne, Eric::0000-0002-3096-050X
dc.source.peerreviewyes
dc.source.beginpage125
dc.source.endpage130
dc.source.journalJournal of Microelectronics and Electronic Packaging
dc.source.issue3
dc.source.volume7
imec.availabilityPublished - imec


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