Authors

Sabuncuoglu Tezcan, Deniz; Pham, Nga; Majeed, Bivragh; Civale, Yann; Beyne, Eric

Conference

218th ECS Meeting Symposium 'Processing, Materials, and Integration of Damascene and 3D Interconnects'

Title

Use of polymer liners for 3D-WLP TSVs: process, reliability and cost

Publication type

Meeting abstract

Embargo date

9999-12-31