Al-mediated solid-phase epitaxy of silicon-on-insulator
dc.contributor.author | Sakic, A. | |
dc.contributor.author | Civale, Yann | |
dc.contributor.author | Nanver, L.K. | |
dc.contributor.author | Biasotto, C. | |
dc.contributor.author | Jovanovic, V. | |
dc.date.accessioned | 2021-10-18T21:10:22Z | |
dc.date.available | 2021-10-18T21:10:22Z | |
dc.date.issued | 2010 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/17931 | |
dc.source | IIOimport | |
dc.title | Al-mediated solid-phase epitaxy of silicon-on-insulator | |
dc.type | Proceedings paper | |
dc.source.peerreview | no | |
dc.source.beginpage | A20-03 | |
dc.source.conference | Amorphous and Polycrystalline Thin-Films Silicon Science and Technology | |
dc.source.conferencedate | 5/04/2010 | |
dc.source.conferencelocation | San Francisco, CA USA | |
imec.availability | Published - imec | |
imec.internalnotes | MRS Symposium Proceedings; Vol. 1245 |
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