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Al-mediated solid-phase epitaxy of silicon-on-insulator

dc.contributor.authorSakic, A.
dc.contributor.authorCivale, Yann
dc.contributor.authorNanver, L.K.
dc.contributor.authorBiasotto, C.
dc.contributor.authorJovanovic, V.
dc.date.accessioned2021-10-18T21:10:22Z
dc.date.available2021-10-18T21:10:22Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17931
dc.sourceIIOimport
dc.titleAl-mediated solid-phase epitaxy of silicon-on-insulator
dc.typeProceedings paper
dc.source.peerreviewno
dc.source.beginpageA20-03
dc.source.conferenceAmorphous and Polycrystalline Thin-Films Silicon Science and Technology
dc.source.conferencedate5/04/2010
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - imec
imec.internalnotesMRS Symposium Proceedings; Vol. 1245


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