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An integrated measurement set-up to study the impact of atmosphere on ESD in MEMS

dc.contributor.authorSangameswaran, Sandeep
dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorCherman, Vladimir
dc.contributor.authorLinten, Dimitri
dc.contributor.authorScholz, Mirko
dc.contributor.authorThijs, Steven
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorGroeseneken, Guido
dc.date.accessioned2021-10-18T21:12:05Z
dc.date.available2021-10-18T21:12:05Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17935
dc.sourceIIOimport
dc.titleAn integrated measurement set-up to study the impact of atmosphere on ESD in MEMS
dc.typeOral presentation
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorCherman, Vladimir
dc.contributor.imecauthorLinten, Dimitri
dc.contributor.imecauthorThijs, Steven
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.orcidimecLinten, Dimitri::0000-0001-8434-1838
dc.contributor.orcidimecThijs, Steven::0000-0003-2889-8345
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewno
dc.source.conferenceInternational ESD Workshop - IEW
dc.source.conferencedate10/05/2010
dc.source.conferencelocationTutzing Germany
imec.availabilityPublished - imec


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