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Robustness levels of MEMS to electrostatic discharge (ESD) stress - guidelines for protection

dc.contributor.authorSangameswaran, Sandeep
dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-18T21:13:22Z
dc.date.available2021-10-18T21:13:22Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17938
dc.sourceIIOimport
dc.titleRobustness levels of MEMS to electrostatic discharge (ESD) stress - guidelines for protection
dc.typeOral presentation
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewno
dc.source.conferenceProf. ir. R. VanCouterenleerstoel K.U. Leuven
dc.source.conferencedate24/11/2010
dc.source.conferencelocationHeverlee Belgium
imec.availabilityPublished - imec


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