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Surface reactions in plasma etching for nanoelectronics

dc.contributor.authorShamiryan, Denis
dc.date.accessioned2021-10-18T21:27:21Z
dc.date.available2021-10-18T21:27:21Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17971
dc.sourceIIOimport
dc.titleSurface reactions in plasma etching for nanoelectronics
dc.typeProceedings paper
dc.source.peerreviewyes
dc.source.conferenceInternational Conference on Modern Problems in the Physics of Surfaces and Nanostructures - ICMPSN
dc.source.conferencedate8/06/2010
dc.source.conferencelocationYaroslavl Russia
imec.availabilityPublished - imec


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