Influence of the top chamber window temperature on the STI etch process

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Authors
Shamiryan, Denis; Danilkin, Evgeny; Tinck, Stefan; Klick, Michael; Milenin, Alexey; Baklanov, Mikhaïl; Boullart, Werner
Conference
China Semiconductor Technology International Conference - CSTIC
Title
Influence of the top chamber window temperature on the STI etch process
Publication type
Proceedings paper
Embargo date
9999-12-31
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