Publication:

Influence of the top chamber window temperature on the STI etch process

Date

2010

Proceedings Paper

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Files

20160.pdf 128 KB

Author(s)

Shamiryan, Denis

;

Danilkin, Evgeny

;

;

;

Milenin, Alexey

;

Baklanov, Mikhaïl

;

Boullart, Werner

Statistics

1828 since deposited on 2021-10-18

Acq. date: 2026-03-01